| 摘要 |
A substrate fixing device and deposition equipment having the same are provided to prevent damage of a substrate by supporting the substrate with a sliding bar of a deflection preventing part. A substrate fixing device(22) includes a substrate fixing part and a deflection preventing part(24). The substrate fixing part has a frame(28), a transfer part(30) supporting and transferring the frame, and plural fixing bars extending from the frame to support a substrate(26). The transfer part fixes and moves the frame using a cylinder unit. The fixing bars of the substrate fixing device are provided on both sides of the frame. The deflection preventing part is provided under the fixing bars. |
