| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an acoustic wave device having a large electromechanical coupling constant. <P>SOLUTION: The present invention is the method for manufacturing an acoustic wave device comprising the steps of: depositing a piezoelectric thin film 14 having a wurtzite crystal structure; measuring a lattice constant of the piezoelectric thin film 14; and changing deposition conditions in the step of depositing the piezoelectric thin film 14, when the lattice constant c is a predetermined value c<SB POS="POST">0</SB>or more. According to the present invention, the method for manufacturing the acoustic wave device having a large electromechanical coupling constant can be provided. <P>COPYRIGHT: (C)2013,JPO&INPIT |
