| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas phase growth apparatus which includes a structure where at least parts of a gas phase growth apparatus body (a facing surface of a susceptor, a control device controlling the electrification to a heater, and the like) are cooled by circulation of a coolant, which prevents foreign objects, such as bacteria and algae, from mixing from the outer air into the coolant. <P>SOLUTION: A circulation passage of a coolant is a seal system and is formed so that the coolant is cooled by conducting heat exchange with cooling means provided at the exterior. More preferably, ion exchange water is used as the coolant. <P>COPYRIGHT: (C)2013,JPO&INPIT |
