| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a protective polymer composition which can be used as a protective layer in processing and transfer steps when producing an apparatus having fine structure and can be removed by heating after use. <P>SOLUTION: In the protective polymer composition, weight loss rates measured by a thermogravimetric analysis under nitrogen atmosphere are as follows: (a) the weight loss rate after a lapse of 30 minutes at 100°C is 10% or less and (b) the weight loss rate after a lapse of 20 minutes from the initiation of the measurement is 80% or more when the temperature is raised at 10°C/min from 25°C, wherein the weight loss rate does not include weight loss caused by volatilization of a solvent component included in the polymer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
