| 发明名称 |
ALUMINUM FILM FORMING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a homogeneous and dense aluminum film by a simple method. <P>SOLUTION: An aluminum film forming method includes: a coating film forming process of coating a surface of a metal oxide layer with composition for forming an aluminum film containing the complex of a first amine compound and aluminum hydride and organic solvent to form a coating film; and an aluminum film forming process of forming the aluminum film on the coating film by executing at least one kind of treatment to be selected from heat treatment and light irradiation treatment. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2013044002(A) |
申请公布日期 |
2013.03.04 |
| 申请号 |
JP20110181196 |
申请日期 |
2011.08.23 |
| 申请人 |
JSR CORP |
发明人 |
YAMAMOTO MASAHIRO;NISHIMURA HIDEKI;AOKI HIDEYUKI;SAKAI TATSUYA |
| 分类号 |
C23C18/14;C23C8/10;C23C18/10;C23C28/00;H01L21/28;H01L21/288 |
主分类号 |
C23C18/14 |
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