| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chuck table capable of processing a workpiece attached to a support substrate made of a rigid body with high accuracy, and a processing device equipped with the chuck table. <P>SOLUTION: A chuck table holds a plate-like object unit composed of a support substrate made of a rigid body and a plate-like object which has a smaller area than the support substrate and is fixed onto the support substrate. The chuck table includes: a holding surface for holding the support substrate side of the plate-like object unit; a suction groove which is formed on the holding surface inside the outer peripheral edge of the support substrate and outside the outer peripheral edge of the plate-like object; and a suction path whose one end is communicated with the suction groove and other end is communicated with a suction source. <P>COPYRIGHT: (C)2013,JPO&INPIT |
