| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the size of defects more accurately than the prior art by taking into account a state of a sensor which detects light from a substrate. <P>SOLUTION: In a sensor which detects light from a substrate, a part is selected which is suitable to obtain the size of defects, and the substrate is moved in accordance with the suitable part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
