| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve exhaust efficiency and space efficiency, thereby completely preventing mist from sticking to a dry substrate after a draining and drying is performed. <P>SOLUTION: Upper and lower air knives 122U, 122L blow a knife-shaped, sharp high pressure air flow against a substrate G as it passes between them, so that a large amount of mist is generated in a space on the upstream side of the air knives 122U, 122L. Most of the mist generated above the substrate G is drawn into an upper exhaust port 124 together with the air coming in a way around from an FFU 136 on the downstream side through a clearance K and the air getting in from an entrance 118. The mist generated beneath the substrate G is entirely drawn into lower exhaust ports 126, 128 together with the air coming in from the FFU 136 and the air getting in from the entrance 118. <P>COPYRIGHT: (C)2013,JPO&INPIT |
