发明名称 |
SYSTEM AND METHOD FOR ASSESSING INHOMOGENEOUS DEFORMATIONS IN MULTILAYER PLATES |
摘要 |
A method and device for evaluating inhomogeneous deformations in a first wafer bonded by molecular adhesion to a second wafer. This evaluation method includes the steps of making at least one reading of a plurality of measurement points, the reading corresponding to a surface profile of the first wafer along a predefined direction and over a predefined length, computing a second derivative from the measurement points of the surface profile and evaluating a level of inhomogeneous deformations in the first wafer according to the second derivative. |
申请公布号 |
US2013054154(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
US201113574585 |
申请日期 |
2011.01.24 |
申请人 |
BROEKAART MARCEL;CASTEX ARNAUD;MARINIER LAURENT;SOITEC |
发明人 |
BROEKAART MARCEL;CASTEX ARNAUD;MARINIER LAURENT |
分类号 |
G01B5/30;G06F19/00 |
主分类号 |
G01B5/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|