| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the mounting area by vertically integrating an electrostatic actuator and a drive integrated circuit that is used to drive the electrostatic actuator. <P>SOLUTION: A first member 32 is provided with electrostatic actuators 46. A second member 33 is provided with drive ICs 72 that are used to drive the electrostatic actuators 46. The first member 32 and the second member 33 are bonded by junction portions 35 and junction portions 36 at the periphery so that the surface on which the electrostatic actuators 46 are provided and the surface on which the drive ICs 72 are provided are faced to each other. In a gap 34 constituted by the first member 32, the second member 33, and the junction portions 35 and 36, the electrostatic actuators 46 and the drive ICs 72 are air-tightly sealed. A capacitor 75 for use in each of the drive ICs 72 is disposed so that the direction of electric field occurring in the capacitor 75 and the direction of electric filed for driving each of the electrostatic actuators 46 are crossed, and preferably are orthogonal to each other. <P>COPYRIGHT: (C)2013,JPO&INPIT |
