发明名称 LITHOGRAPHIC METHOD FOR PRODUCTION OF COMPLET MICROSTRUCTURES WITH A POSSIBILITY OF THE SPECTRAL MODIFICATION
摘要 <p>The present invention relates to a method for microstructuring a substrate. In the method according to the invention a substrate with a region to be structured is provided, and then by applying colloid spheres into this region, a colloid sphere monolayer is formed. The thus applied colloid sphere monolayer exhibits a certain geometrical symmetry. Said colloid sphere monolayer is then illuminated with a beam of spatially modulated intensity distribution synchronized to said monolayer, thereby performing mechanical structuring in said region in conformity with a de¬ sired pattern through concentrating beam intensity via near-field effect behind said colloid sphere monolayer in the propagation direction of light.</p>
申请公布号 HU1100461(A2) 申请公布日期 2013.02.28
申请号 HU20110000461 申请日期 2011.08.23
申请人 SZEGEDI TUDOMANYEGYETEM 发明人 CSETE MARIA;SIPOS ARON;SZALAI ANIKO
分类号 G03F7/00 主分类号 G03F7/00
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