POSITIONING DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To reduce leakage of gas warmed by a driving part of a mobile body.

SOLUTION: A mobile body positioning device comprises: a driving part having a stator 3 and a mover 5; a housing 7 having an opening 11 and an exhaust port; an exhaust part exhausting gas in the housing from the exhaust port; and a control part. The mover 5 is connected to the mobile body 2 via a connection member 10. The housing 7 houses the mover 5 and the stator 3 across a driving range of the mover 5. The opening 11 allows movement of the connection member 10 together with driving of the mover 5. The exhaust port includes end exhaust ports 8a, 8b arranged at a first end Ea and a second end Eb of the driving range. The control part increases an exhaust amount from the end exhaust port 8a arranged at the first end Ea when the mover 5 is driven toward the first end Ea on the first end side of the driving range more than when the mover 5 is positioned at the center of the driving range.

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