| 摘要 |
<p>System and method for controlling the temperature of a MEMS device, using a first ovenized system, at least one second ovenized system and a temperature control loop. The first ovenized system comprises an ovenized MEMS device, a first heat source and first means for adjusting the heating power. Each second ovenized system comprises an ovenized replica MEMS device, a second heat source, second means for adjusting the heating power and temperature sensing means. The temperature control loop adjusts the heating power of the first and second heat sources by generating a control signal in response to a signal received from the temperature sensing means.</p> |
