CATHODICALLY-PROTECTED PAD CONDITIONER AND METHOD OF USE

摘要

A cathodically-protected pad conditioner (100) for chemical mechanical planarization includes: an abrasive member (110) including a metallic substrate (112), a support carrier (120), and an anode (130) affixed to the peripheral edge (124) of the support carrier (120). A cathodic protection circuit (140) is configured to provide a cathodic protection current from the anode (130) to the abrasive member (110) if contacted with an electrolyte solution. A method of using the cathodically-protected pad conditioner (100) is also disclosed.