| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus which enables lighting of a processing area to automatically turn on or off when a door provided in the processing area is opened or closed. <P>SOLUTION: The semiconductor manufacturing apparatus includes: a chuck table holding a workpiece; processing means performing processing to the workpiece held by the chuck table; a processing area where the processing means is disposed; a processing area cover covering the processing area; and a door installed on the processing area cover. Lighting means for lighting the processing area is disposed in the processing area, and the door includes opening and closing detection means for detecting opening and closing of the door. When the opening state of the door is detected by the opening and closing detection means, the lighting means is turned on. When the closing state of the door is detected, the lighting means is turned off. <P>COPYRIGHT: (C)2013,JPO&INPIT |
