| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a diamond-like carbon film capable of forming a diamond-like carbon film on a metallic object for film forming, and a metallic object with the diamond-like carbon film. <P>SOLUTION: A metallic object for film forming 30 being an object of diamond-like carbon film forming is arranged in a flow channel 14 where gas RG for film forming including methane gas flows. While the gas RG for film forming flows at a predetermined flow rate through the flow channel 14, the object for film forming 30 is subjected to a process of raising its temperature from room temperature to a predetermined temperature to cause a reaction between impurities on the surface 30f of the object for film forming and the gas RG for film forming, thereby removing the impurities from the surface 30f of the object for film forming. Furthermore, a reaction between metal elements exposed by the removal of the impurities and the gas RG for film forming is caused, thereby forming the diamond-like carbon film 34 on the surface 30f of the object for film forming. <P>COPYRIGHT: (C)2013,JPO&INPIT |
