| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microarray substrate facilitating fixing of a target and capable of recovering it without giving damage thereto. <P>SOLUTION: The microarray substrate includes: a base material 11; a plurality of target fixing areas 12 regularly disposed on the base material 11 and enclosed with a part where the base material 11 is exposed; and bridge parts 14 that are provided on the same side with the target fixing areas 12 of the base material 11, and connect the plurality of target fixing areas 12 to each other so as to apply voltage to the plurality of target fixing areas 12. The target fixing area 12 includes a carbonaceous film 13, and a plasma processing layer 13A formed on the surface of the carbonaceous film 13. The plasma processing layer 13A has an ionic functional group connected to a carbon comprising the carbonaceous film 13. The bridge part 14 comprises the carbonaceous film 13, and the thickness of the carbonaceous film 13 in the bridge part 14 is thinner than that in the target fixing area 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
