REDUCED CONSUMPTION STAND ALONE RINSE TOOL HAVING SELF-CONTAINED CLOSED-LOOP FLUID CIRCUIT, AND METHOD OF RINSING SUBSTRATES USING THE SAME

摘要

A system and method of for rinsing substrates that reduces or substantially eliminates rinse fluid consumption. In one embodiment, the method comprises: a) providing a fixed volume of a rinse fluid in a stand-alone rinse tool comprising a closed-loop fluid-circuit comprising a rinse tank, a deionizer, a pump, and a recirculation line fluidly coupled to an outlet of the rinse tank and an inlet of the rinse tank; and b) performing a plurality of rinse cycles in the stand-alone rinse tool using the fixed volume of the rinse fluid, wherein each of the plurality of rinse cycles comprises: b-1) positioning a batch of substrates comprising ionic impurities in the rinse tank.