| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which efficiently images information of a sample acquired by using an electromagnetic wave pulse. <P>SOLUTION: A terahertz wave measurement instrument 100 includes a moving mechanism 15 for moving an irradiation unit 12 relatively to a sample W and a control unit 17 for controlling a delay unit 14 so as to set an optical path length of probe light LP12 impinging on a detection unit 13 to a first measurement optical path length, a second measurement optical path length, and a third measurement optical path length different from one another. Further, the terahertz wave measurement instrument 100 includes a data conversion unit 25 for converting a field intensity detected by the detection unit 13 to gradation data showing gradation characteristics of RGB and an image generation unit 26 for generating an image which represents information about the field intensity detected by the detection unit 13, in a color tone corresponding to the gradation data. <P>COPYRIGHT: (C)2013,JPO&INPIT |
