| 摘要 |
An apparatus arranged to analyze a multi-layer optical material structure, the apparatus constituted of: a control unit, a light source outputting light; and a light receiver arranged to receive the light from the light source after interaction with the target structure, the control unit arranged to: detect the amplitude of the received light as a function of wavelength; perform a transform of a function of the detected amplitudes to the optical thickness domain; determine, responsive to a planned composition of the target multi-layer structure, optical thickness and amplitude of expected peaks of the performed transform to the optical thickness domain which correspond with interactions with single interface between layers; identify actual peaks of the performed transform to the optical thickness domain which correspond with interfaces between layers; and determine at least one physical characteristic of the target structure responsive to the determined peaks. |
