发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING PATTERN HARDENING FILM USING PHOTOSENSITIVE RESIN COMPOSITION, AND ELECTRONIC COMPONENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which can acquire performance in which physical properties of a film after hardening is not inferior to physical properties of a film hardened at high temperature, and to provide a method for manufacturing a pattern hardening film using the resin composition and electronic components. <P>SOLUTION: A resin composition contains: (a) a polybenzoxazole precursor having a repeating unit represented by general formula (I) (in the formula, U or V denotes a divalent organic group and at least one of U or V is a group including a 1-30C aliphatic chain structure); (b) a photosensitive agent; (c) a solvent; and (e) a dissolution inhibitor. The resin composition is used as a photosensitive resin composition of the above problem. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013041300(A) |
申请公布日期 |
2013.02.28 |
申请号 |
JP20120238314 |
申请日期 |
2012.10.29 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD |
发明人 |
IWASHITA KENICHI;NOKITA RIKA |
分类号 |
G03F7/023;C08G73/22;G03F7/004;G03F7/40;H01L21/027 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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