发明名称 PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING PATTERN HARDENING FILM USING PHOTOSENSITIVE RESIN COMPOSITION, AND ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition which can acquire performance in which physical properties of a film after hardening is not inferior to physical properties of a film hardened at high temperature, and to provide a method for manufacturing a pattern hardening film using the resin composition and electronic components. <P>SOLUTION: A resin composition contains: (a) a polybenzoxazole precursor having a repeating unit represented by general formula (I) (in the formula, U or V denotes a divalent organic group and at least one of U or V is a group including a 1-30C aliphatic chain structure); (b) a photosensitive agent; (c) a solvent; and (e) a dissolution inhibitor. The resin composition is used as a photosensitive resin composition of the above problem. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013041300(A) 申请公布日期 2013.02.28
申请号 JP20120238314 申请日期 2012.10.29
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 IWASHITA KENICHI;NOKITA RIKA
分类号 G03F7/023;C08G73/22;G03F7/004;G03F7/40;H01L21/027 主分类号 G03F7/023
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