| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that it is difficult to prevent the film quality of a formed film from being deteriorated when vacuum deposition is performed using an evaporation material in a state of a solution in an inline system. <P>SOLUTION: A film forming device includes: an evaporation chamber 10; an auxiliary chamber 20 separated via a partition wall 40; an evaporation material supplying belt 30 provided movably from the evaporation chamber to the auxiliary chamber through the partition wall; an evaporation material solution supplying part (34) of supplying an evaporation material solution onto the evaporation material supplying belt in the auxiliary chamber; a heating part 33 of performing heating in such a manner that the evaporation material on the evaporation material supplying belt in the evaporation chamber is vaporized; and a holding-carrying part of a film forming object 1; wherein a solvent is evaporated and separated in a state where the evaporation material in the evaporation material solution supplied from the evaporation material solution supplying part is left on the evaporation material supplying belt in the auxiliary chamber, the evaporation material heated in the heating part is evaporated in the evaporation chamber and the obtained vapor of the evaporation material is jetted and deposited on the film forming object, and thus the film of the evaporation material is formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
