发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device comprises an MIS field effect transistor including a channel region made of p-conductive silicon, a gate insulating film including a first insulating film having dielectric constant higher than dielectric constant of silicon dioxide, and a gate electrode. The gate electrode includes a first metal film formed on the gate insulating film and having a work function greater than a work function of intrinsic semiconductor silicon, and a p-conductive silicon film formed on the first metal film and in contact with the first metal film.
申请公布号 US2013049091(A1) 申请公布日期 2013.02.28
申请号 US201213567478 申请日期 2012.08.06
申请人 SAINO KANTA;ELPIDA MEMORY, INC. 发明人 SAINO KANTA
分类号 H01L29/78;H01L27/108 主分类号 H01L29/78
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