| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of evaluating and studying a sample in an active atmosphere with an environmental transmission electron microscope (ETEM) while drift of the sample is not a limiting factor in the resolution of images acquired. <P>SOLUTION: A sample is exposed to inert gas at a desired temperature before exchanging the inert gas to active gas to avoid or suppress drift. The invention is applicable to an optical microscope, X-ray microscope or scanning probe microscope. <P>COPYRIGHT: (C)2013,JPO&INPIT |
