METHODS FOR FORMING CONNECTIONS TO A MEMORY ARRAY AND PERIPHERY

摘要

Methods are disclosed for forming connections to a memory array and a periphery of the array. The methods include forming stacks of conductive materials on the array and the periphery and forming a step between the periphery stack and the array stack. The step is removed during subsequent processing, and connections are formed from the conductive materials remaining on the array and the periphery. In some embodiments, the step is removed before any photolithographic processes.