| 摘要 |
A method of constructing a database for etching profile is disclosed. First, a standard etching group including a standard etching structure and a deviated etching group including a deviated etching structure are provided. Second, a remote sensing (RS) step is carried out to collect a standard RS data belonging to the standard etching group and a deviated RS data belonging to the deviated etching group. Then, the RS data is analyzed to infer feature parameters of the etching groups. Next, a deviated physical parameter is verified. Later, the correlation between the feature parameters and the deviated physical parameter is calculated to construct an etching profile database including the standard RS data and the deviated RS data. The etching profile database may facilitate the prediction of an unknown etching profile.
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