发明名称 |
ELECTROMECHANICAL SYSTEM STRUCTURES WITH RIBS HAVING GAPS |
摘要 |
This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body. |
申请公布号 |
US2013050290(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
US201213591842 |
申请日期 |
2012.08.22 |
申请人 |
ANDERSSON MARK B.;WU JOYCE H.;STEYN JASPER LODEWYK;PIXTONIX, INC. |
发明人 |
ANDERSSON MARK B.;WU JOYCE H.;STEYN JASPER LODEWYK |
分类号 |
G02B26/00;G09G5/10 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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