发明名称 PHOTOSENSITIVE RESIN COMPOSITION FOR PHOTOSPACER AND PHOTOSPACER USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a spacer having high exposure sensitivity to g-line and h-line and showing excellent profiles in both of a main PS (photospacer) and a sub PS. <P>SOLUTION: A photosensitive resin composition is provided, comprising (A) a photopolymerization initiator, (B) a solvent, (C) a polymerizable monomer, and (D) an alkali-soluble resin. The (A) photopolymerization initiator comprises one or more O-acyloxime ester compounds and one or more &alpha;-aminoacetophenone compounds. With the photosensitive resin composition, two or more independent patterns can be simultaneously formed. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013041152(A) 申请公布日期 2013.02.28
申请号 JP20110178445 申请日期 2011.08.17
申请人 FUJIFILM CORP 发明人 SATAKE AKIRA;NAKAMURA HIDEYUKI
分类号 G03F7/031;C08F2/50;G02F1/1339;G03F7/027;G03F7/033 主分类号 G03F7/031
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