发明名称 |
METHOD FOR THE CHARACTERISATION OF AT LEAST ONE LAYER OF MATERIAL COMPRISING SEMICONDUCTOR NANOCRYSTALS |
摘要 |
<p>The invention relates to a method for the characterisation of a layer (110) of material comprising semiconductor nanocrystals (108), including the following steps consisting in: forming an alternating stack of m first layers (110) having a complex refractive index n1 and m second layers (106) having a complex refractive index n2 that is different from n1, in which the first layers (110) comprise semiconductor nanostructures (108), said stack being disposed on a substrate (102), wherein m = 2; measuring the reflectivity of the stack in a wavelength range; calculating n1 on the basis of m, the thicknesses of the first and second layers and the stack reflectivity measurement, using an optical transfer-matrix calculation; and calculating the capacitance C1 of one of the first layers on the basis of the measurement of the capacitance of the stack and the substrate.</p> |
申请公布号 |
WO2013026861(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
WO2012EP66303 |
申请日期 |
2012.08.22 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;BAUDRIT, MATHIEU;MUR, PIERRE;SURANA, KAVITA;THONY, PHILIPPE |
发明人 |
BAUDRIT, MATHIEU;MUR, PIERRE;SURANA, KAVITA;THONY, PHILIPPE |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|