| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus capable of coating even a minute amount of a coating agent. <P>SOLUTION: In the coating apparatus, a syringe 42 is connected to a head 21, and a resin 11 is supplied to the storing space 31 of the head 21. The precompression corresponding to an air pressure from a pressure control part 51 is applied to the resin 11 in the storing space 31. A communicating hole 61 comprising the small hole part 63 and a taper part 64 is provided to the nozzle part 23 of the head 21. The small hole part 63 is composed to enable storage of the amount of the resin 11 sufficient for bonding chips. The resin 11 is coated on a bonding place 101 by inserting an extrusion tool 74 into the head 21, and applying the resin 11 stored in a small diameter part 82 to the top of the extrusion tool 74 for extrusion. <P>COPYRIGHT: (C)2013,JPO&INPIT |
