发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 In one embodiment, a semiconductor device includes a substrate, and a gate insulator disposed on the substrate. The device further includes a gate electrode including a first electrode layer which is disposed on an upper surface of the gate insulator and has a first work function, and a second electrode layer which is continuously disposed on the upper surface of the gate insulator and an upper surface of the first electrode layer and has a second work function that is different from the first work function, and sidewall insulators disposed on side surfaces of the gate electrode. A height of the upper surface of the first electrode layer is lower than a height of upper surfaces of the sidewall insulators.
申请公布号 US2013049122(A1) 申请公布日期 2013.02.28
申请号 US201213534665 申请日期 2012.06.27
申请人 MIYATA TOSHITAKA;AOKI NOBUTOSHI;KABUSHIKI KAISHA TOSHIBA 发明人 MIYATA TOSHITAKA;AOKI NOBUTOSHI
分类号 H01L29/78;H01L21/283 主分类号 H01L29/78
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