Z-AXIS STAGE DRIVING APPARATUS, STAGE DRIVING APPARATUS, AND METHOD FOR MANIPULATING STAGE DRIVING APPARATUS

摘要

Disclosed is Z-axis stage driving apparatus to move a stage on which a workpiece such as a wafer is placed along a Z-axis. The Z-axis stage driving apparatus includes a motor, a plurality of elevating devices to move a stage along a Z-axis, a power transmission device to transmit power of the motor to the plurality of elevating devices, and a clutch to control power transmission between the power transmission device and the elevating devices.