发明名称 ENCODER DEVICE AND DEVICE
摘要 <p>An encoder device comprises: a light source part further comprising a first light source part which emits a first illumination light and a second light source part which emits a second illumination light; a modulation part which modulates the light quantity of the first illumination light and/or the light quantity of the second illumination light; a scale which is capable of moving relative to the light source part and wherein the first illumination light and the second illumination light enter; a light receiving part which receives the first illumination light and the second illumination light wherein a prescribed phase difference has occurred and outputs a received light signal according to the received first illumination light and second illumination light; and a location detection unit which detects the location of the scale on the basis of the received light signal.</p>
申请公布号 WO2013027805(A1) 申请公布日期 2013.02.28
申请号 WO2012JP71351 申请日期 2012.08.23
申请人 NIKON CORPORATION;MAKINOUCHI SUSUMU;WATANABE AKIHIRO 发明人 MAKINOUCHI SUSUMU;WATANABE AKIHIRO
分类号 G01D5/36 主分类号 G01D5/36
代理机构 代理人
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