发明名称 |
ENCODER DEVICE AND DEVICE |
摘要 |
<p>An encoder device comprises: a light source part further comprising a first light source part which emits a first illumination light and a second light source part which emits a second illumination light; a modulation part which modulates the light quantity of the first illumination light and/or the light quantity of the second illumination light; a scale which is capable of moving relative to the light source part and wherein the first illumination light and the second illumination light enter; a light receiving part which receives the first illumination light and the second illumination light wherein a prescribed phase difference has occurred and outputs a received light signal according to the received first illumination light and second illumination light; and a location detection unit which detects the location of the scale on the basis of the received light signal.</p> |
申请公布号 |
WO2013027805(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
WO2012JP71351 |
申请日期 |
2012.08.23 |
申请人 |
NIKON CORPORATION;MAKINOUCHI SUSUMU;WATANABE AKIHIRO |
发明人 |
MAKINOUCHI SUSUMU;WATANABE AKIHIRO |
分类号 |
G01D5/36 |
主分类号 |
G01D5/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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