| 发明名称 |
RISING AGENT, AND METHOD FOR PRODUCTION OF HARD DISK SUBSTRATE |
| 摘要 |
<p>Provided are a rinsing agent to produce a hard disk substrate free from remainingabrasive grains as well as apt defect on the surface thereof and a method for production of a hard disk substrate using such a rinsing agent. A rinsing agent of the present invention is rinsing solution containing colloidal silica as abrasive grains. Letting that the colloidal silica abrasive grains have a concentration C and an. average grain size R (C and R are represented in weight% and nm, respectively), the concentration C and the average grain size R of the colloidal silica abrasive grains have a relation matching the following Expression (I):</p> |
| 申请公布号 |
SG187170(A1) |
申请公布日期 |
2013.02.28 |
| 申请号 |
SG20130005152 |
申请日期 |
2011.07.19 |
| 申请人 |
TOYO KOHAN CO., LTD.;KOHAN KOGYO CO., LTD. |
发明人 |
IWAMOTO NOBUHIRO;MUKAI NOBUAKI;ARAI KAZUTAKA;KOTANI RYUJI |
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