| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable only a material in a desired region to be deposited and thereby enable formation of a fine pattern, to reduce manufacturing cost by enhancing utilization efficiency of materials, and to shorten time period required for deposition and thereby improve productivity. <P>SOLUTION: A first substrate having on one surface a reflection layer with an opening, a light absorption layer, and a material layer formed in contact with the light absorption layer is used. A surface of the first substrate where the material layer is formed and a deposited surface of a second substrate are made opposite to each other. A laser beam is radiated from the other surface of the first substrate. A part of the material layer located at a position overlapping with the opening of the reflection layer is selectively heated to deposit the part of the material layer on the deposited surface of the second substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
