| 摘要 |
Provided is a defect detection apparatus capable of scalably improving processing performance for image processing, even though a plurality of multi-core processors are used therein. The defect detection apparatus comprises: an imaging unit for taking images of a sample forming a pattern, a dividing part 4b for dividing image data taken by the imaging unit into a plurality of image data blocks, and a parallel processing unit 5 for parallelly performing pieces of a defect detection processing for the plurality of the image data blocks to detect a defect in the pattern. Herein, the parallel processing unit uses a plurality of multi-core processors having a plurality of cores. The defect inspection processing of the image data block is performed per the multi-core processor. |
