发明名称 |
ELECTRO-ACOUSTIC TRANSDUCER AND METHOD OF MANUFACTURING THE SAME |
摘要 |
Electro-acoustic transducers and methods of manufacturing the electro-acoustic transducer are provided. An electro-acoustic transducer includes: a first wafer including a first substrate in which a plurality of electro-acoustic transducer cells are formed; and a second wafer disposed in a lower portion of the first wafer, and including a second substrate in which a plurality of through wafer vias are formed. A method of manufacturing an electro-acoustic transducer includes: forming a plurality of electro-acoustic transducer cells in a first substrate of a first wafer; forming a plurality of through wafer vias in a second substrate of a second wafer; and bonding the first and second wafers to each other. |
申请公布号 |
US2013051179(A1) |
申请公布日期 |
2013.02.28 |
申请号 |
US201213401324 |
申请日期 |
2012.02.21 |
申请人 |
HONG SEOG-WOO;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HONG SEOG-WOO |
分类号 |
B06B1/02;B23K31/02;B32B37/14;B32B38/04;H01L21/02 |
主分类号 |
B06B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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