| 摘要 |
<p>10 ARC DEPOSITION SOURCE HAVING A DEFINED ELECTRIC FIELD AbstractThe invention relates to an arc deposition device, comprising a cathode, an anode, as well as a voltage source for putting the anode at positive potential relative to the cathode. The device also comprises magnetic elements, which cause a magnetic field over the cathode surface, wherein the anode is arranged in the vicinity of the cathode in such a way that the magnetic field lines exiting from the cathode surface hit the anode.TRANSLATION OF FIGURES Figures 6, 7, 9, 11:Kathode cathodeAnode anodeSubstrat substrateKammerwand chamber wall</p> |
