摘要 |
A transistor includes a substrate. An electrically conductive material layer, having a thickness, is positioned on the substrate. The electrically conductive material layer contains a reentrant profile such that one portion of the electrically conductive material overhangs another portion of the electrically conductive material. An electrically insulating material layer, having a thickness, is conformally positioned over the second electrically conductive material layer, the first electrically conductive material layer, and at least a portion of the substrate.
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