| 摘要 |
PURPOSE: A sawing device for led materials and a method for sawing the same are provided to improve the precision of a sawing process by using a chuck table. CONSTITUTION: A blade saws an LED material. A chuck table includes a mounting portion(230) and a main block(210,220). The LED material is mounted on the mounting portion. The main block supports the mounting portion. A cooling unit cools the LED material mounted on the mounting portion.
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