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发明名称
APPARATUS FOR FORMING THIN FILM AND METHOD FOR FORMING THIN FILM
摘要
申请公布号
EP2423351(A4)
申请公布日期
2013.02.27
申请号
EP20100766805
申请日期
2010.04.14
申请人
PANASONIC CORPORATION
发明人
SHINOKAWA YASUHARU;SHIBUTANI,SATOSHI;HONDA ,KAZUYOSHI;KAMIYAMA,YUMA;YAMAMOTO ,MASAHIRO
分类号
C23C14/56;C23C14/50;C23C16/54
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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