| 摘要 |
PURPOSE: A probe card for micro-pattern measurement is provided to minimize a contact demand space of circuit substrate micro-patterns of a holing type probe. CONSTITUTION: A probe card for micro-pattern measurement comprises a contact substrate(100), a holing type probe(200), and an alignment guide bar. The contact substrate is combined with a circuit substrate in which an electric pattern is formed. The contact substrate forms a contact pattern which is electrically connected to the electric pattern. The holing type probe is electrically connected to the contact substrate and comprises a plurality of needles. The plurality of needles is electrically connected to a micro-pattern of an object to be tested. The alignment guide bar is inserted into a curved portion of the holing type probe and fixes and supports the binding position of the holing type probe. |
