SEALING ASSEMBLY AND APPARATUS FOR TREATING SUBSTRATE

摘要

PURPOSE: A sealing assembly and a substrate processing apparatus are provided to improve the adhesion of a sealing member by using the sealing member for a surface contact. CONSTITUTION: A chamber(400) includes a processing space. A door(420) opens or closes an opening. A sealing member is provided between the door and the chamber. The sealing member seals a space between the door and the chamber when the opening is closed. A body(450) is combined with one of the chamber and the door.