发明名称 Computer generated hologram, exposure apparatus and device fabrication method
摘要 <p>The present invention provides a computer generated hologram (100) including a plurality of cells (110a to 110d) which form a light intensity distribution (LI) on a predetermined plane (PS), the plurality of cells including a plurality of first cells (110a to 110d) including isotropic media (112) and anisotropic media (114), and a plurality of second cells (110a) including anisotropic media alone, wherein the plurality of cells change a phase of incident light which impinges on each of the plurality of cells to form a phase distribution including N (N ‰¥ 2) for each of a wavefront of a linearly polarized light component in a first direction and a wavefront of a linearly polarized light component in a second direction perpendicular to the first direction.</p>
申请公布号 EP2133755(B1) 申请公布日期 2013.02.27
申请号 EP20090161275 申请日期 2009.05.27
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUBARA, ISAO
分类号 G03H1/08;G03F7/20 主分类号 G03H1/08
代理机构 代理人
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