APPARATUS FOR CONTROLLING TEMPERATURE OF SUBSTRATE, DEPOSITION APPARATUS HAVING THE SAME AND METHOD FOR MANUFACTURING SOLAR CELL USING THE SAME

摘要

PURPOSE: An apparatus for controlling the temperature of a substrate, a depositing apparatus including the same, and a method for manufacturing a solar cell using the same are provided to reduce the temperature deviation of the substrate by decreasing the temperature deviation of a susceptor. CONSTITUTION: A temperature control unit is installed in a susceptor(11) to support a substrate and controls the temperature of the substrate supported by the susceptor. A circulating unit is connected to the temperature control unit and moves temperature control fluid. A temperature control line(21) provides a moving path of the temperature control fluid.