发明名称 METHOD OF TRANSFERRING GRAPHENE USING TRENCH AND SUBSTRATE FOR TRANSFERRING GRAPHENE
摘要 <p>PURPOSE: A method for transferring graphene using a trench and a graphene transfer target substrate are provided to reduce the time of a dry process by efficiently evaporating adhesive solutions using the trench. CONSTITUTION: A trench(110) is formed on the upper side of a substrate(100) by patterning the substrate. A graphene layer wet with the adhesive solutions is arranged on the substrate. The graphene layer is pressurized on the substrate. The adhesive solutions are removed by drying the substrate.</p>
申请公布号 KR20130020424(A) 申请公布日期 2013.02.27
申请号 KR20110083054 申请日期 2011.08.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SEO DAVID;HEO, JIN SEONG;CHUNG, HYUN JONG;YANG, HEE JUN;PARK, SEONG JUN;SONG, HYUN JAE
分类号 H01L21/02;H01L21/336;H01L21/786;H01L29/78 主分类号 H01L21/02
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