发明名称 SEMICONDUCTOR WAFER CHIP INSPECTION SYSTEM
摘要 PURPOSE: A semiconductor wafer chip test system including a picking apparatus is provided to increase inspection speed for a semiconductor chips by simultaneously transferring two semiconductor chips. CONSTITUTION: A wafer loader(100) gradually provides a wafer by mounting a wafer cassette including the wafer. A picking unit(120) simultaneously transfers two semiconductor chips using two nozzles. An index rail(200) moves the semiconductor chips by receiving the semiconductor chips through a chip mounting frame. A first test apparatus(220) tests one of the semiconductor chips which are moved through the index rail. A second test apparatus(240) tests another semiconductor chip which is not tested by the first test apparatus. [Reference numerals] (100) Wafer loader; (110) Wafer cassette; (120) Picking unit; (200) Index rail; (210) First chip arrangement unit; (220) First test apparatus; (230) Second chip arrangement unit; (240) Second test apparatus; (250) Pick up apparatus; (260) Transfer; (300) Pick up apparatus; (AA) Buffer stage; (BB) Wafer stage; (CC) Classification stage
申请公布号 KR101236889(B1) 申请公布日期 2013.02.27
申请号 KR20110022711 申请日期 2011.03.15
申请人 发明人
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
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