| 摘要 |
PURPOSE: A triaxial laser marker is provided to correct the size of a beam spot and focus distance at the same time through a correction unit, thereby maintaining an even beam spot quality. CONSTITUTION: A triaxial laser marker is composed of a control unit(10), an X,Y scan mirror(20), a focus correcting unit, and a beam spot correcting unit(60). The control unit corrects focus distance toward a laser beam irradiated to a marking object(70) through the X,Y scan mirror. The focus correcting unit controls a focal axis toward the laser beam irradiated to the X,Y scan mirror according to the control of the control unit. A correcting unit controls the size of a beam spot toward the laser beam irradiated to the beam spot correcting unit according to the control of the control unit in order to correct the size of the beam spot toward the laser beam. The beam spot correcting unit includes an expander(62) for correcting the size of a beam spot and an actuator(64) for correcting the size of a beam spot for correcting a distance between two lens composed of the expander. [Reference numerals] (10) Control unit; (20) X,Y scan mirror; (30) X-scan axis actuator; (40) Y-scan axis actuator; (54) Focal distance correction actuator; (64) Beam spot size correction actuator; (AA) Center part of a scan field; (BB) Center of the scan field; (CC) Periphery part of the scan field |
