The invention relates to an apparatus and a method for imaging surface area of a sample having a surface topography with the aid of confocal microscopy, such as confocal Raman and/or fluorescence microscopy. The apparatus comprises a surface topography sensor that provides values for the surface topography. The surface topography values allow for the surface to be maintained in the confocal plane during scanning.
申请公布号
EP2561392(A1)
申请公布日期
2013.02.27
申请号
EP20110716829
申请日期
2011.04.13
申请人
WITEC WISSENSCHAFTLICHE INSTRUMENTE UND TECHNOLOGIE GMBH
发明人
SPIZIG, PETER DR.;IBACH, WOLFRAM;SANCHEN, DETLEF;VOLSWINKLER, GERHARD;HOLLRICHER, OLAF