发明名称 Method for two-sided fabrication of a memory array
摘要 <p>A method for fabricating a memory array includes fabricating a first portion (110, 310, 510) of a memory array on a first side (14, 214, 414) of a substrate (12, 212, 412). A second portion (150, 350, 550) of the memory array is fabricated on a second, opposite side (16, 216, 416) of the substrate (12, 212, 412). The first portion (110, 310, 510) and the second portion (150, 350, 550) of the memory array are coupled to each other through the substrate (12, 212, 412).</p>
申请公布号 EP0993037(B1) 申请公布日期 2013.02.27
申请号 EP19990203187 申请日期 1999.09.29
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MCKEE, JEFFERY A.
分类号 H01L21/8242;H01L27/10;H01L27/06;H01L27/108 主分类号 H01L21/8242
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